5W. Fang, Li S-S, Cheng C-L, Chang C-I, Chen W-C, et al. (2013) CMOS MEMS: A key technology towards the "More than Moore" era. The 17th International Conference on Solid-State Sensors. Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). 2513-2518.